Gases & vacuum
Bulk gases, specialty gas cabinets, clean dry air and vacuum pumps feed every tool. Lose supply and the tools stop; a leak is a life-safety matter. 18 device types.
Air compressor
Compressed air is the plant's "fourth utility", driving cylinders, spray guns and tools. Two run, one stands by.
Protocols: Modbus TCP · OPC UA · EtherNet/IP · Modbus RTU
Used in: Electronics & flat-panel display · New-energy manufacturing · Biopharma & life sciences · General & discrete manufacturing · Copper tube & metal processing · Glass manufacturing
9 brands: Bolaite, Fusheng, Gardner Denver, Hitachi, Ingersoll Rand, Kaeser, Kaishan, Quincy Compressor, Sullair
Bulk chemical delivery system
Delivers acids, bases, solvents and developer from storage to the tools through double-contained piping. Leaks are sensed in drip pans and the annulus; the system shuts itself off.
Protocols: Modbus TCP · OPC UA
Used in: Semiconductor & IC manufacturing · Electronics & flat-panel display
4 brands: Air Liquide, Entegris, Kinetics, PNC
Bulk gas supply
Liquid nitrogen, oxygen or argon tanks, or hydrogen tube trailers, vaporized and delivered at steady pressure. Low level means call for a delivery; a very cold vaporizer outlet means demand exceeds vaporizer capacity.
Protocols: Modbus TCP · BACnet/IP · OPC UA
Used in: Semiconductor & IC manufacturing · Electronics & flat-panel display · New-energy manufacturing · Biopharma & life sciences · Copper tube & metal processing · Glass manufacturing
10 brands: Air Liquide, Air Products, Airgas, Applied Energy Systems, Chart Industries, CKD, Hangyang, Huate, Linde, Matheson
CDA header
Site-wide CDA pressure, dew point and demand — the pressure the tools actually get.
Protocols: Modbus TCP · OPC UA · EtherNet/IP · Modbus RTU
Used in: Semiconductor & IC manufacturing · Electronics & flat-panel display · New-energy manufacturing
6 brands: Atlas Copco, Ingersoll Rand, Kaeser, Parker Hannifin, Shanli, Sullair
Chemical dilution unit
Blends concentrated chemicals to the ratio the tools need; concentration drift hurts the process.
Protocols: Modbus TCP · OPC UA
Used in: Semiconductor & IC manufacturing · Electronics & flat-panel display
Clean dry air compressor
A large oil-free centrifugal compressor supplying clean dry air to valves and tools. When one trips the others must pick up within seconds or header pressure sags and tools alarm off.
Protocols: Modbus TCP · OPC UA · EtherNet/IP
Used in: Semiconductor & IC manufacturing · Electronics & flat-panel display · New-energy manufacturing
3 brands: Atlas Copco, Ingersoll Rand, Kaeser
CMP slurry supply
Blends CMP slurry and circulates it to the polishers. Rising large-particle counts mean wafer scratches.
Protocols: Modbus TCP · OPC UA
Used in: Semiconductor & IC manufacturing
4 brands: Air Liquide, Entegris, Kinetics, PNC
Compressed-air header
Header pressure is what the tools actually get. Below about 95 psi, pneumatic tools and clamps start to fail.
Protocols: Modbus TCP · OPC UA · EtherNet/IP · Modbus RTU
Used in: Biopharma & life sciences · General & discrete manufacturing · Copper tube & metal processing · Glass manufacturing
6 brands: Atlas Copco, Ingersoll Rand, Kaeser, Parker Hannifin, Shanli, Sullair
Cryogenic vaporizer
Vaporizes liquid nitrogen, oxygen or hydrogen; too-cold outlet gas cracks downstream pipe.
Protocols: Modbus TCP · Modbus RTU
Used in: Semiconductor & IC manufacturing · New-energy manufacturing · Biopharma & life sciences
4 brands: Chart Industries, Cryoquip, Furui, Linde
Desiccant air dryer
Dries compressed air to about −94°F (−70°C) dew point. A rising dew point means moisture is entering the CDA network.
Protocols: Modbus TCP · OPC UA · EtherNet/IP · Modbus RTU
Used in: Semiconductor & IC manufacturing · Electronics & flat-panel display · New-energy manufacturing · Biopharma & life sciences
6 brands: Atlas Copco, Ingersoll Rand, Kaeser, Parker Hannifin, Shanli, Sullair
House vacuum system
Provides vacuum for wafer wands, chucks and cleaning systems.
Protocols: Modbus TCP
Used in: Semiconductor & IC manufacturing · New-energy manufacturing · General & discrete manufacturing
4 brands: Busch, Dekker Vacuum, Ebara, Edwards
Nitrogen purifier
Purifies bulk nitrogen to ppb levels; O₂ or moisture breakthrough hurts yield.
Protocols: Modbus TCP · OPC UA · Modbus RTU
Used in: Semiconductor & IC manufacturing · Electronics & flat-panel display
4 brands: Entegris, Huabang, Japan Pionics, SAES Pure Gas
On-site nitrogen generator
PSA or cryogenic on-site nitrogen. Off-purity output switches the site to its liquid-nitrogen backup.
Protocols: Modbus TCP · OPC UA · Modbus RTU
Used in: Semiconductor & IC manufacturing · Electronics & flat-panel display · New-energy manufacturing · Copper tube & metal processing · Glass manufacturing
6 brands: Air Products, Atlas Copco, Hangyang, Hengda, Parker Hannifin, Peak Scientific
Process vacuum pump
A dry pump under a process chamber. A stopped pump or rising inlet pressure aborts the process and can scrap product; the N2 purge prevents corrosion and powder build-up.
Protocols: Modbus TCP · Modbus RTU
Used in: Semiconductor & IC manufacturing · Electronics & flat-panel display
6 brands: Busch, Ebara, Edwards, Kashiyama, Leybold, Pfeiffer Vacuum
Specialty gas cabinet
An exhausted enclosure holding toxic, flammable or corrosive cylinders, with automatic purge, excess-flow and auto-shutoff valves. Shut-off is done by the cabinet and GMS; the platform only monitors.
Protocols: Modbus TCP · BACnet/IP · OPC UA
Used in: Semiconductor & IC manufacturing · Electronics & flat-panel display · New-energy manufacturing
7 brands: Air Liquide, Applied Energy Systems, CKD, Huate, Linde, Matheson, PNC
Specialty gas usage meter
Tracks use and days of supply per gas for cost allocation and cylinder ordering. Read-only.
Protocols: Modbus TCP · EtherNet/IP
Used in: Semiconductor & IC manufacturing · Electronics & flat-panel display
8 brands: Applied Energy Systems, Brooks Instrument, CKD, Horiba STEC, Huate, Matheson, MKS Instruments, NAURA
Tank farm level
Raw and finished product tanks: level, temperature and high-high interlocks (read-only).
Protocols: Modbus TCP · Modbus RTU · OPC UA
Used in: Semiconductor & IC manufacturing · General & discrete manufacturing · Glass manufacturing
9 brands: Dichuan, Emerson, Endress+Hauser, Flowline, Honeywell, Siemens, SUPCON DCS, Veeder-Root, VEGA
Valve manifold box
Splits one specialty-gas line to several tools inside an exhausted, leak-monitored box.
Protocols: Modbus TCP · BACnet/IP · OPC UA
Used in: Semiconductor & IC manufacturing · Electronics & flat-panel display
6 brands: Air Liquide, Applied Energy Systems, CKD, Huate, Matheson, PNC
A brand that is not listed can still be connected if the device speaks one of the supported protocols: it starts from the generic protocol template and is adjusted to the vendor's point list.