NAURA
FacilityOS recognizes NAURA equipment during a network scan and connects it over Modbus TCP, OPC UA.
Region: China · Category: Gases & vacuum, Process
Product families
| Product families | Device types | Protocols | How it connects | |
|---|---|---|---|---|
| Specialty gas usage meterCS200 · D07 | Specialty gas usage meter | Modbus TCP | RS-485 / Modbus | To be confirmed |
| PECVD coater / Diffusion furnace / CZ crystal pullerHORIS · NMC612 · THEORIS | PECVD coater, Diffusion furnace, CZ crystal puller | OPC UA | SECS/GEM (HSMS) through an equipment host gateway, or OPC UA | To be confirmed |
To be confirmed Point map to be confirmed against the vendor's register list before use.
A brand that is not listed can still be connected if the device speaks one of the supported protocols: it starts from the generic protocol template and is adjusted to the vendor's point list.