Exhaust & abatement
Acid and alkali scrubbers, VOC concentrators and oxidizers, general exhaust. They protect people and keep the air permit. 10 device types.
Acid exhaust scrubber
Absorbs acid fumes (HF, HCl…) in a caustic recirculation spray. Low pH or low water flow cuts removal efficiency and can breach the air permit.
Protocols: Modbus TCP · BACnet/IP · Modbus RTU
Used in: Semiconductor & IC manufacturing · Electronics & flat-panel display · New-energy manufacturing
4 brands: CEC Environmental, CECO Environmental, Ershigs, Tri-Mer
Alkaline exhaust scrubber
Absorbs ammonia and other alkaline fumes in an acid recirculation spray. High pH cuts removal efficiency.
Protocols: Modbus TCP · BACnet/IP · Modbus RTU
Used in: Semiconductor & IC manufacturing · Electronics & flat-panel display
4 brands: CEC Environmental, CECO Environmental, Ershigs, Tri-Mer
Continuous emissions monitor (CEMS)
Monitors a stack's SO₂, NOx, CO, CO₂/O₂, particulate and flow continuously per EPA 40 CFR Part 60 / Part 75 — the legal record for permit compliance and quarterly reports. Read-only: the platform never writes to the analysers.
Protocols: Modbus TCP · OPC UA · Modbus RTU
6 brands: ABB, Focused Photonics, SDL, SICK, Siemens, Thermo Fisher Scientific
Dust collector
Captures process dust. High filter pressure drop means cleaning or new cartridges; spark detection is an explosion-safety function.
Protocols: Modbus TCP · BACnet/IP · EtherNet/IP · MQTT · Modbus RTU
Used in: New-energy manufacturing · General & discrete manufacturing · Copper tube & metal processing · Glass manufacturing
5 brands: Camfil, CECO Environmental, Donaldson Torit, Kelin, Nederman
Exhaust fan
Removes heat, fumes and odours to keep indoor air healthy.
Protocols: Modbus TCP · Modbus RTU · BACnet/IP · S7 · EtherNet/IP
Used in: Electronics & flat-panel display · Biopharma & life sciences · General & discrete manufacturing · Commercial buildings · Healthcare
21 brands: ABB, Danfoss, Delta Electronics, Fuji Electric, Greenheck, Inovance, Invertek Drives, INVT, Lenze, Mitsubishi Electric, Nidec Control Techniques, Schneider Electric, SEW-Eurodrive, Siemens, SINEE, Toshiba, V&T, Vacon, WEG, Yaskawa, Yaskawa Shanghai
NMP solvent recovery
Condenses NMP solvent out of cathode coating oven exhaust. Falling recovery wastes solvent and can push the stack over its permit.
Protocols: Modbus TCP · OPC UA
Used in: New-energy manufacturing
3 brands: Dürr, Seibu Giken, Zhongneng Huanke
Point-of-use abatement
Burns or scrubs toxic, flammable and greenhouse gases right at the tool. A bypass sends untreated gas into the main exhaust.
Protocols: Modbus TCP · BACnet/IP · Modbus RTU
Used in: Semiconductor & IC manufacturing · Electronics & flat-panel display
9 brands: CEC Environmental, CECO Environmental, CSK, DAS Environmental Expert, Ebara, Edwards, Ershigs, Shengjian, Tri-Mer
Process exhaust system
A fan set keeping the general, heat, solvent or acid exhaust main under suction. Weak suction means tool exhaust fails, fumes can escape and tools interlock off.
Protocols: BACnet/IP · Modbus TCP · Modbus RTU · MQTT
Used in: Semiconductor & IC manufacturing · Electronics & flat-panel display · New-energy manufacturing · Biopharma & life sciences · Glass manufacturing
5 brands: Detong, Greenheck, Loren Cook, Nederman, Strobic Air
Regenerative thermal oxidizer
The RTO burns solvent out of paint exhaust — a condition of the air permit. Low temperature or an open bypass means an emissions violation.
Protocols: Modbus TCP · OPC UA · EtherNet/IP
Used in: Semiconductor & IC manufacturing · Biopharma & life sciences · General & discrete manufacturing
4 brands: Anguil, CECO Adwest, Dürr, Zhongneng Huanke
VOC concentrator
A zeolite rotor adsorbs dilute solvent exhaust and sends a small, concentrated stream to the thermal oxidizer.
Protocols: BACnet/IP · Modbus TCP · OPC UA · EtherNet/IP
Used in: Semiconductor & IC manufacturing · Electronics & flat-panel display · New-energy manufacturing
5 brands: Anguil, Dürr, Munters, Seibu Giken, Zhongneng Huanke
A brand that is not listed can still be connected if the device speaks one of the supported protocols: it starts from the generic protocol template and is adjusted to the vendor's point list.