Electronics & flat-panel display
Panel fabs, touch and module assembly, and SMT electronics: huge cleanrooms and FFU fields, chemical supply, wet-bench exhaust, nitrogen reflow and ESD control.
How FacilityOS helps
- Cleanroom zones, FFU banks and particle counters for large-glass fabs.
- Ultrapure water, specialty gases, wastewater treatment and compressed air as utilities with efficiency KPIs.
- Gas detection and fire systems monitored only, with linkage verification after every event.
Platform modules used
FMCS
Facility management and control
The whole cooling and power chain at a glance, with redundancy, shift handover, utility efficiency and first-out alarm analysis.
Learn more →EPMSElectrical power monitoring system
IEC 61850 read-only, sequence of events to the microsecond, COMTRADE waveforms, power quality, breaker wear, relay settings, arc-flash labels and transformer life.
Learn more →EMSEnergy management system
Electricity, gas, water and steam metering by workshop and system, time-of-use cost, demand, carbon, PUE and tamper-evident report archives.
Learn more →SCADASupervisory control and data acquisition
Editable HMI graphics, live values and trends, bulk history export to CSV and Parquet, event replay, and northbound OPC UA and MQTT Sparkplug B.
Learn more →CMMSMaintenance management
Asset register linked to live data, preventive maintenance by calendar, run hours or starts, signed work orders, QR/NFC inspection rounds, spares and MTBF/MTTR.
Learn more →Segments
LCD / OLED panel fab
Gen 8.5+ fabs: ISO 4–6 array and cell rooms with tens of thousands of FFUs.
Learn more →Touch & module assembly
ISO 6–7 assembly, lamination and burn-in.
Learn more →SMT / PCBA electronics assembly
Placement, reflow, AOI, ESD control and humidity.
Learn more →Systems and equipment
Core: every site of this kind has it. Common: most sites have it. Optional: depends on the site.
Chiller plant & PCW
Panel fabs have enormous cooling loads; the plant is the largest power user.
| Equipment | Level | Points worth watching | Notes |
|---|---|---|---|
| Large centrifugal chillerLCD / OLED panel fab | Core | CHW supply temp · CHW return temp · Load · Power draw · Efficiency (kW/ton) · Fault | Thousand-ton centrifugals (Trane, York, Carrier, Daikin) on BACnet/IP, typically N+1. |
| ChillerTouch & module assembly · SMT / PCBA electronics assembly | Core | CHW supply temp · CHW return temp · Load · Power draw · Efficiency · Fault | Mid-size plant chillers on BACnet/IP. |
| Cooling tower cell | Core | Tower leaving water · Tower entering water · Fan speed · Basin level · Water conductivity · Fan vibration | |
| Pump | Core | Running · Speed · Differential pressure | Chilled and condenser water pumps; drives usually on Modbus TCP. |
| Process cooling water loopLCD / OLED panel fab | Core | Supply temp · Return temp · Supply pressure · Supply-return differential · Loop flow · Loop conductivity · Leak detected | |
| Heat-recovery chiller / heat pump | Optional | Hot water supply temp · Chilled water supply temp (recovery side) · Power draw · Combined COP | Heat recovery displacing boiler gas — one of the main decarbonization levers. |
| Process chillerTouch & module assembly · SMT / PCBA electronics assembly | Common | Process water supply temp · Process water return temp · Load |
Cleanroom & environment
FFU-field availability, pressure and particles drive point-defect rates.
| Equipment | Level | Points worth watching | Notes |
|---|---|---|---|
| Make-up air unitLCD / OLED panel fab · Touch & module assembly | Core | Supply air temp · Supply dew point · Outdoor airflow · Fan speed · Final filter pressure drop · Fault | Dew-point control sets cleanroom humidity. |
| Fan-filter unit bank | Core | FFUs running · FFUs in fault · Average speed · Bank power · FFU network fault | Group by feeder or control segment; clustered failures usually mean a circuit. |
| Cleanroom zone | Core | Pressure vs adjacent · Room temp · Relative humidity · Downflow velocity · Target class (ISO 14644-1) · Door held open | Typical cascade 0.02–0.06 inWC (5–15 Pa). |
| Particle counter | Core | Particles ≥ 0.1 µm · Particles ≥ 0.3 µm · Particles ≥ 0.5 µm · Particles ≥ 5.0 µm · Measured class (ISO equivalent) · Above target ISO class | ISO 14644-1 limits are per m³; divide by 35.3147 for per ft³. |
| Cleanroom FMCS summaryLCD / OLED panel fab | Common | Worst zone particles ≥ 0.5 µm · FFUs in fault (all banks) · Zones out of spec | |
| Air handlerSMT / PCBA electronics assembly | Common | Supply air temp · Duct static pressure | |
| ESD monitoringSMT / PCBA electronics assembly · Touch & module assembly | Core | Stations monitored · Stations failing now · Floor humidity · Wrist strap / footwear fail · Bench ground fault | Humidity is usually held somewhere in 30–70 %RH (site-specific). |
| Airborne molecular contamination monitor | Common | Acids · Bases (NH₃) | |
| Fab micro-vibration monitor | Optional | VC criterion met · Above tool spec |
Production equipment status
Reflow and AOI status on SMT lines.
| Equipment | Level | Points worth watching | Notes |
|---|---|---|---|
| Reflow oven (N2)SMT / PCBA electronics assembly | Core | Peak zone temp · Tunnel O2 (N2 atmosphere) · N2 flow · Conveyor speed · Fault | Nitrogen reflow typically holds a few hundred to 1,000 ppm O2. |
| Automated optical inspectionSMT / PCBA electronics assembly | Core | Boards inspected today · True defect rate · False-call rate | |
| Line controller (OEE)SMT / PCBA electronics assembly · Touch & module assembly | Common | OEE · Output (parts/h) · Good parts today · Energy per part | |
| Thermal oil heater | Common | Outlet oil temp · Low-flow trip |
CDA, nitrogen, specialty gas & chemicals
Array uses silane, ammonia and NF3; wet processes use developer, stripper and etchants.
| Equipment | Level | Points worth watching | Notes |
|---|---|---|---|
| Clean dry air compressorLCD / OLED panel fab | Core | Discharge pressure · Output · Load · Power draw · Surge detected · Fault | |
| Air compressorTouch & module assembly · SMT / PCBA electronics assembly | Core | Discharge pressure · Load · Power draw · Fault | |
| Desiccant air dryer | Core | Pressure dew point · Pressure drop · Regeneration temp · Fault | Typical pressure dew point −94°F (−70°C). |
| CDA header | Core | Header pressure · Header dew point · Demand | |
| Bulk gas supply | Core | Tank level · Supply pressure · Vaporizer outlet temp · Flow · Impurity · Reserve supply in use | N2, O2, Ar, H2, CO2; tank telemetry is usually the gas supplier's. |
| On-site nitrogen generator | Common | Product O2 content · Output · Outlet pressure · Off-purity (on LIN backup) | |
| Specialty gas cabinetLCD / OLED panel fab | Core | Cylinder pressure · Delivery pressure · Cabinet exhaust · Excess-flow trip · Auto-shutoff valve closed | |
| Valve manifold boxLCD / OLED panel fab | Common | Distribution pressure · Enclosure gas detected · Auto-shutoff valve closed | |
| Specialty gas usage meterLCD / OLED panel fab | Common | Current use · Used today (scf) · Days of supply left | |
| Bulk chemical delivery systemLCD / OLED panel fab · Touch & module assembly | Core | Supply tank level · Day tank level · Supply pressure · Supply flow · Drip-pan leak · Double-containment leak · Auto-shutoff valve closed | TMAH developer can be fatal through the skin; treat its leaks at top priority. |
| Process vacuum pumpLCD / OLED panel fab | Common | Inlet pressure · Motor power · Service warning | |
| Chemical dilution unit | Common | Outlet concentration · Leak · Concentration alarm | |
| Nitrogen purifier | Common | Outlet O₂ |
UPW & wastewater
Panel cleaning uses enormous volumes of UPW.
| Equipment | Level | Points worth watching | Notes |
|---|---|---|---|
| Reverse osmosis unitLCD / OLED panel fab | Core | Permeate conductivity · Permeate flow | |
| Electrodeionization unitLCD / OLED panel fab | Core | Product resistivity · Product flow | |
| UPW polishing loopLCD / OLED panel fab | Core | Supply resistivity · TOC · Supply flow · Supply pressure · Storage tank level | Panel fabs commonly run ≥ 17 MΩ·cm. |
| Water reclaim systemLCD / OLED panel fab | Common | Reclaim flow · Reclaim rate · Diverted to drain (off-spec) | |
| pH neutralization systemLCD / OLED panel fab · Touch & module assembly | Core | Effluent pH · Caustic dosing · Flow | |
| Final effluent monitorLCD / OLED panel fab | Core | Discharge flow · Discharge pH · COD | |
| Domestic water booster | Common | Discharge pressure · Flow | |
| Resistivity analyzer | Common | Resistivity |
Wet-bench exhaust & abatement
Wet-bench exhaust and scrubbers protect people and the permit.
| Equipment | Level | Points worth watching | Notes |
|---|---|---|---|
| Process exhaust system | Core | Exhaust main static · Exhaust airflow · Fans running · Low exhaust static | Wet-bench exhaust (acid, alkali and solvent kept separate). |
| Acid exhaust scrubberLCD / OLED panel fab · Touch & module assembly | Core | Recirculation pH · Recirculation flow · Packing pressure drop | |
| Alkaline exhaust scrubberLCD / OLED panel fab | Core | Recirculation pH · Recirculation flow | |
| VOC concentratorLCD / OLED panel fab | Core | Outlet VOC · Removal efficiency | |
| Point-of-use abatementLCD / OLED panel fab | Common | Combustion / reaction temp · Bypassed (untreated) | |
| Exhaust fanSMT / PCBA electronics assembly | Common | Running · Speed | Reflow exhaust. |
Power & sub-metering
Meter array, cell, module and CUB separately.
| Equipment | Level | Points worth watching | Notes |
|---|---|---|---|
| Medium-voltage switchgearLCD / OLED panel fab | Core | Bus voltage · Incoming current · Real power · Breaker closed · Protective trip · Relay trouble | Monitor only — never operate breakers. |
| Low-voltage switchgear | Core | Bus voltage · Load current · Real power · Power factor · Current THD · Breaker trip | |
| Power transformerLCD / OLED panel fab | Core | Top-oil temp · Winding temp · Load · Gas / sudden-pressure alarm · Over-temperature alarm | |
| TransformerTouch & module assembly · SMT / PCBA electronics assembly | Common | Winding temp · Load · Over-temperature alarm | Dry-type transformers. |
| UPS | Core | Load · Battery runtime · On bypass | SNMP v3 (UPS-MIB). |
| UPS battery string monitor | Core | String voltage · Lowest jar voltage · Highest jar voltage · Highest jar internal resistance · Highest jar temp · State of charge | Per-jar resistance trending (one of the maintenance practices in IEEE 1188). |
| Generator | Common | Running · Output power · Fuel tank level · Starting battery voltage · Not in AUTO | |
| Power quality meter | Common | Voltage THD · Current THD · Voltage sags today · Sag / interruption event | Voltage sags are a common hidden cause of trips. |
| Site utility meter | Core | Site power · Site power (MW) · Energy today · Power factor | |
| Area energy meter | Core | Area power · Energy today · 15-min demand · Power factor | Sub-metering by workshop or system for energy analysis and cost allocation. |
| Natural gas meter | Common | Natural gas flow · Heat input (1,037 BTU/scf) · Gas today (scf) | Natural gas in scfh, converted to BTU/h by heating value. |
| Active harmonic filter (APF) | Common | After current THD · Unit load · Modules in fault · Fan fault | |
| Dynamic voltage restorer (DVR) | Optional | Sags corrected today · On bypass | |
| Partial discharge monitor | Common | Discharge magnitude | |
| Tool PDU / EMO | Common | EMO pressed |
Life safety Monitor only
Gas monitoring, chemical leaks and fire. Monitor only.
| Equipment | Level | Points worth watching | Notes |
|---|---|---|---|
| Gas monitoring systemLCD / OLED panel fab | Core | Active alarms · Active faults · Auto-shutoff activated · Evacuation alarm | The GMS performs the shut-off interlocks; the platform only monitors. |
| Silane detectorLCD / OLED panel fab | Core | Silane (SiH4) · Alarm 1 (low) · Alarm 2 (high) | |
| Ammonia detectorLCD / OLED panel fab | Core | Ammonia level · Ammonia alarm | |
| NF3 detectorLCD / OLED panel fab | Common | Nitrogen trifluoride (NF3) · Alarm 1 (low) · Alarm 2 (high) | |
| HF detectorLCD / OLED panel fab | Common | Hydrogen fluoride (HF) · Alarm 1 (low) · Alarm 2 (high) | |
| Oxygen deficiency monitor | Core | Oxygen · Alarm 1 (O2 below 19.5 %) · Alarm 2 (O2 below 18 %) | Nitrogen and inert-gas areas: 19.5 % and 18 % stages. |
| Leak detection cable | Core | Leak detected · Distance to leak · Leak zone · Cable break or contamination | |
| Fire alarm zone & linkage | Core | Fire alarm · Supervisory · Trouble · Linkage: air handlers stopped · Linkage: fire/smoke dampers closed · Linkage: smoke exhaust running · Linkage: elevators recalled | Linkage proofs verify the fire system did what it should. |
| Fire alarm panel | Core | Fire alarm · Supervisory signal · Trouble signal | Monitor only (NFPA 72). |
| Aspirating smoke detector | Common | Smoke obscuration (%/ft) · Alert · Action · Fire 1 · Airflow fault | |
| Smoke exhaust fan | Common | Running · Damper not proven | Smoke exhaust or stair pressurization fans; monitor only. |
Security & video Monitor only
Camera and door status, and video linkage: cameras are linked to areas, devices and alarm rules; on an alarm the gateway takes an ONVIF snapshot and attaches it to the alarm, with a live-view link to the NVR/VMS. Core never contacts a camera.
| Equipment | Level | Points worth watching | Notes |
|---|---|---|---|
| Video camera | Common | Online · Recording · Motion detected · Video analytics alarm · Tamper (blocked or moved) | Status via the VMS (Milestone, Genetec…); on an alarm the gateway takes an ONVIF snapshot and attaches it to the alarm — Core never contacts a camera. |
| Access-controlled door | Common | Door open · Door held open · Door forced | Door events can drive camera linkage. |
Life-safety equipment (fire alarm, gas detection, emergency power transfer) and protection devices are monitored only. FacilityOS never sends them commands.
Standards and compliance
| Standards and compliance | Notes |
|---|---|
| ISO 14644-1 | Cleanroom classification; array areas commonly ISO 4–5, cell and module ISO 6–7. |
| SEMI S2 | Equipment EHS guideline, widely applied to FPD tools. |
| NFPA 318 | Fire protection for semiconductor fabrication facilities, commonly applied to FPD fabs. |
| ANSI/ESD S20.20 | ESD control program for electronic parts and assemblies. |
| IPC J-STD-001 | Requirements for soldered electrical and electronic assemblies. |
| IPC-A-610 | Acceptability of electronic assemblies. |
| IPC/JEDEC J-STD-033 | Handling of moisture-sensitive devices (tied to floor humidity). |
| NFPA 72 | National Fire Alarm and Signaling Code. |
| IEC 62443 | Industrial automation and control system security. |
Standards are listed with what they cover; numeric values are typical figures, not requirements for every site. FacilityOS supports your compliance work; it does not certify a site.
KPIs the platform tracks
| KPIs the platform tracks | Notes |
|---|---|
| Cleanroom ΔP low point | Lowest pressure across clean zones. |
| FFU availability | FFUs running ÷ installed. |
| UPW supply flow | gpm, against wet-process demand. |
| Scrubber pH | Share of time each scrubber's pH stayed in range. |
| Energy per board / panel | Area energy ÷ MES output. |
Reports
| Reports | Notes |
|---|---|
| FFU health report | Failure distribution, clustering by circuit and replacement plan. |
| Chemical supply & leak report | Levels, tote changes, annulus and drip-pan alarms and shut-offs. |
| ESD compliance report | Station failures, humidity excursions and corrections. |
| Emissions & discharge compliance | Scrubber pH and flow and outfall records. |
How we deliver
We can take a Electronics & flat-panel display project from survey and design through procurement, installation, commissioning and training — all of it, or only the stages you need.
- Site survey & needs assessment
- Solution design
- Procurement
- Installation
- Commissioning & acceptance
- Training
- Go-live & support
Demo site
Austin Display Fab
A 24/7 Gen 8.5 display fab: huge FFU cleanrooms, high-capacity chillers and PCW, UPW, specialty gas and bulk chemical delivery, scrubbers and VOC abatement.
Open the Austin Display Fab demo site to see this industry with simulated live data: process graphics, video wall, alarm drills and remote adjustment.
Try the live demo