Cleanroom
Make-up air, recirculation units, fan-filter units, room pressure cascades and particle counts. Lose cleanliness and the work in process may be scrapped. 20 device types.
Air handler
The air handler supplies conditioned air to the spaces it serves (offices, meeting rooms, work areas) and sets their temperature and comfort.
Protocols: BACnet/IP · Modbus TCP · Modbus RTU
Used in: Electronics & flat-panel display · New-energy manufacturing · General & discrete manufacturing
26 brands: Alerton, Automated Logic, Contemporary Controls, Daikin, Dashi, Delta Controls, Distech Controls, FläktGroup, Honeywell, Johnson Controls, Kieback&Peter, KMC Controls, Priva, Reliable Controls, Sauter, Schneider Electric, Siemens, SUPCON, Swegon, Systemair, Tianda Qiushi, TICA, Trane, Trend Control Systems, Tridium, Tsinghua Tongfang
Airborne molecular contamination monitor
Acids, bases, organics and dopants in cleanroom air; lithography is especially sensitive.
Protocols: Modbus TCP
Used in: Semiconductor & IC manufacturing · Electronics & flat-panel display
4 brands: Focused Photonics, Particle Measuring Systems, Picarro, TOFWERK
Biosafety cabinet
Inflow protects the operator, downflow protects the work. Out-of-range airflow means the cabinet no longer protects (NSF/ANSI 49 certification).
Protocols: Modbus TCP · BACnet/IP · Modbus RTU
Used in: Biopharma & life sciences · Healthcare
5 brands: Esco Lifesciences, Haier Biomedical, Labconco, NuAire, The Baker Company
Cleanroom FMCS summary
The facility monitoring system's roll-up of every clean zone: worst-zone particles, total FFU faults and zones out of spec. Read-only.
Protocols: OPC UA · Modbus TCP · BACnet/IP
Used in: Semiconductor & IC manufacturing · Electronics & flat-panel display
4 brands: Acrel, Honeywell, Johnson Controls, Siemens
Cleanroom zone
A clean zone must stay positive to its neighbours (typically 0.02–0.06 inWC) with stable temperature and humidity. A pressure reversal means dirty air is flowing in.
Protocols: Modbus TCP · BACnet/IP · Modbus RTU
Used in: Semiconductor & IC manufacturing · Electronics & flat-panel display · New-energy manufacturing · Biopharma & life sciences
12 brands: Antec Controls, Dwyer, Lighthouse Worldwide Solutions, Particle Measuring Systems, Phoenix Controls, Price Industries, Setra, Siemens, Sujing, Suxin, Triatek, TSI
Desiccant dehumidifier
A desiccant wheel dries supply air to about −60°F dew point and is regenerated with hot air. If the wheel stops or regeneration runs cold, the dry room dew point rises within minutes.
Protocols: BACnet/IP · Modbus TCP · Modbus RTU
Used in: New-energy manufacturing
5 brands: Bry-Air, Jieli, Munters, Seibu Giken, SEMCO
Dry room
Cell assembly dry rooms must stay below −40°F (−40°C) dew point: moisture reacts with electrolyte to form HF and ruins cells. More people and open doors raise the dew point.
Protocols: Modbus TCP · Modbus RTU · BACnet/IP
Used in: New-energy manufacturing
13 brands: Antec Controls, Bry-Air, Jieli, Munters, Phoenix Controls, Price Industries, Setra, Siemens, Sujing, Suxin, Triatek, TSI, Vaisala
ESD monitoring
Continuously checks wrist straps, bench grounds and floor humidity (ANSI/ESD S20.20). Low humidity raises ESD risk.
Protocols: Modbus TCP · Modbus RTU
Used in: Electronics & flat-panel display
Fab micro-vibration monitor
Lithography and metrology need floors at VC-C to VC-E.
Protocols: Modbus TCP · OPC UA
Used in: Semiconductor & IC manufacturing · Electronics & flat-panel display
4 brands: Brüel & Kjær Vibro, COINV, Colin Gordon Associates, Rion
Fan-filter unit bank
Hundreds of small ceiling fans with HEPA/ULPA filters blow clean air down over the work. A few failures are tolerable; a cluster of failures puts that bay out of class.
Protocols: BACnet/IP · Modbus TCP · Modbus RTU
Used in: Semiconductor & IC manufacturing · Electronics & flat-panel display
6 brands: AAF Flanders, Camfil, Envirco, Price Industries, Sujing, Zhongjian Huanbao
Fume hood
At about 100 fpm face velocity it keeps chemical fumes in the hood. A low-flow alarm needs action now.
Protocols: BACnet/IP · Modbus TCP
Used in: Biopharma & life sciences · Healthcare
5 brands: Esco Lifesciences, Labconco, Phoenix Controls, Strobic Air, Waldner
GMP cleanroom
A cleanroom graded B, C or D per EU GMP Annex 1: a 10–15 Pa (about 0.04–0.06 inWC) cascade to the next lower grade, with temperature, humidity and particles in limits.
Protocols: BACnet/IP · Modbus TCP · Modbus RTU · OPC UA
Used in: Biopharma & life sciences
11 brands: Antec Controls, Phoenix Controls, Price Industries, Rotronic, Setra, Siemens, Sujing, Suxin, Triatek, TSI, Vaisala
GMP environmental monitoring system
A validated, independent system that records cleanroom and cold-chain excursions (21 CFR Part 11). The platform shows its roll-up; it does not replace it.
Protocols: Modbus TCP · Modbus RTU · MQTT · OPC UA
Used in: Biopharma & life sciences
Grade A zone (RABS / isolator)
The unidirectional-flow Grade A zone over aseptic filling. Limit 3,520 particles ≥ 0.5 µm per m³ (about 100 per ft³); airflow about 90 fpm (0.45 m/s).
Protocols: BACnet/IP · Modbus TCP · Modbus RTU
Used in: Biopharma & life sciences
11 brands: Antec Controls, Lighthouse Worldwide Solutions, Particle Measuring Systems, Phoenix Controls, Price Industries, Setra, Siemens, Sujing, Suxin, Triatek, TSI
Humidifier
Electrode, resistive, spray or steam humidification holding room humidity.
Protocols: BACnet/IP · Modbus TCP · Modbus RTU
Used in: Semiconductor & IC manufacturing · Biopharma & life sciences · Data centers · Healthcare
Make-up air unit
Filters, cools and humidifies outdoor air for the cleanroom. It sets the building's humidity (dew point) and replaces the air the exhaust removes. Lose one and room pressure and humidity drift.
Protocols: BACnet/IP · Modbus TCP
Used in: Semiconductor & IC manufacturing · Electronics & flat-panel display · New-energy manufacturing · Biopharma & life sciences
8 brands: Daikin, Daikin Applied, FläktGroup, Greenheck, Huntair, Modine, Reznor, Trane
Particle counter
Counts airborne particles from 0.1 to 5 µm per cubic foot and converts them to an ISO 14644-1 class. Above the target class, product is at risk of contamination.
Protocols: Modbus TCP · BACnet/IP · Modbus RTU
Used in: Semiconductor & IC manufacturing · Electronics & flat-panel display · New-energy manufacturing
7 brands: Beckman Coulter, Lighthouse Worldwide Solutions, Particle Measuring Systems, Rion, Sujing, Suxin, TSI
Pass-through / airlock interlock
Both doors must never be open together or the clean grade is breached.
Protocols: Modbus TCP · BACnet/IP · Modbus RTU
Used in: Semiconductor & IC manufacturing · Biopharma & life sciences
3 brands: Esco Lifesciences, Sujing, Terra Universal
Recirculation air unit
Cools cleanroom return air on a dry coil and returns it to the plenum above the fan-filter units, removing the tools' heat.
Protocols: BACnet/IP
Used in: Semiconductor & IC manufacturing · Biopharma & life sciences
Vivarium room
Temperature, humidity, pressure, air changes and photoperiod in an animal room all affect the validity of the research.
Protocols: BACnet/IP · Modbus TCP · Modbus RTU
Used in: Biopharma & life sciences
9 brands: Antec Controls, Phoenix Controls, Price Industries, Setra, Siemens, Sujing, Suxin, Triatek, TSI
A brand that is not listed can still be connected if the device speaks one of the supported protocols: it starts from the generic protocol template and is adjusted to the vendor's point list.