Entegris
FacilityOS recognizes Entegris equipment during a network scan and connects it over Modbus TCP, OPC UA.
Region: United States · Category: Gases & vacuum
Product families
| Product families | Device types | Protocols | How it connects | |
|---|---|---|---|---|
| Bulk chemical / slurry deliveryIntelliGen · BCD | Bulk chemical delivery system, CMP slurry supply | Modbus TCP · OPC UA | SECS/GEM (HSMS) through an equipment host gateway, or OPC UA | To be confirmed |
| Chemical dilution / GateKeeper gas purifiersGateKeeper · InVue | Chemical dilution unit, Nitrogen purifier | Modbus TCP · OPC UA | Machine PLC: Modbus TCP / OPC UA / EtherNet/IP | To be confirmed |
To be confirmed Point map to be confirmed against the vendor's register list before use.
A brand that is not listed can still be connected if the device speaks one of the supported protocols: it starts from the generic protocol template and is adjusted to the vendor's point list.