Tokyo Electron
FacilityOS recognizes Tokyo Electron equipment during a network scan and connects it over OPC UA.
Region: Japan · Category: Process
Product families
| Product families | Device types | Protocols | How it connects | |
|---|---|---|---|---|
| TELINDY / Tactras / TriasTELINDY PLUS · Tactras · Trias | PECVD coater, Diffusion furnace | OPC UA | SECS/GEM (HSMS) through an equipment host gateway, or OPC UA | To be confirmed |
To be confirmed Point map to be confirmed against the vendor's register list before use.
A brand that is not listed can still be connected if the device speaks one of the supported protocols: it starts from the generic protocol template and is adjusted to the vendor's point list.